TiO2-Al2O3-La2O3 thin films were prepared on glass substrates from solution of Ti [OCH(CH3)2]4, AlCl3.6H2O and LaCl3.7H2O at room temperature using a chemical bath deposition (CBD) method. The morphological, structural and optical properties of the TiO2-Al2O3-La2O3 thin films were investigated using Xray diffraction (XRD), field emission- scanning electron microscopy (FE-SEM), Fourier- infrared (FT-IR) spectrometer, Raman spectrometer and UV-VIS spectrophotometry. The XRD results showed that the average crystal size for TiO2-Al2O3-La2O3 film at La concentration, with the hexagonal phase and the degree of crystallization strengthening after annealing. The Raman spectrum showed many small peaks and abroad peak, after annealed the intensity of peaks decreases with increasing the La concentration, and sharp peaks are observed in only at the first concentration and a large hump with increasing the concentration of (La). FT-IR spectra showed absorption peaks of different functional groups (i.e., O-H, C-O, Ti-O-Ti, Al-O and La-O), it’s become sharp peaks after annealing with increasing concentration of La, which indicate of crystallization. FESEM images revealed 3D particles of TiO2-Al2O3- La2O3 thin film, and the films were almost homogeneous and uniform. The bandgap energy (Eg) of TiO2-Al2O3 doped with La thin film show decreased in the value with increase (La) concentration in both cases before and after annealing, respectively

Keywords : TiO2-Al2O3 -La2O3; CBD; Annealing; Morphological; Band-Gap Energy.